首页 > 产品信息 > 电子、电力 > 其它电力、电子

接触式双面光刻机 1
  • 接触式双面光刻机 1

接触式双面光刻机

型号:EVG®610
品牌:EVG
原产地:奥地利
类别:电子、电力 / 其它电力、电子
标签︰EVG单面光刻机 , EVG双面光刻机 , 610单双面光刻机
单价: €300000 / 件
最少订量:1 件
发送查询 添加到查询篮

会员信息

详细信息

上海螣芯电子科技有限公司

免费会员上海市闵行区
即时通讯:点击这里给我发消息 上线︰2021/01/15

产品描述

Features

  • Wafer/substrate size from pieces up to 200 mm/8’’
  • Top-side and bottom-side alignment capability
  • High-precision alignment stage
  • Automated wedge compensation sequence
  • Motorized and recipe-controlled exposure gap
  • Supports the latest UV-LED technology
  • Minimized system footprint and facility requirements
  • Step-by-step process guidance
  • Remote tech support
  • Multi-user concept (unlimited number of user accounts and recipes, assignable access rights, different user interface languages)
  • Agile processing and conversion re-tooling
  • Table top or stand-alone version with anti-vibration granite table
  • Additional capabilities:
    • Bond alignment
    • IR alignment
    • Nanoimprint lithography (NIL)

Technical Data

Alignment modes
Top side alignment: ≤ ± 0,5 µm
Bottom side aligment: ≤ ± 2,0 µm
IR alignment: ≤ ± 2,0 µm/ substrate material depending
Bond alignment: ≤ ± 2,0 µm
NIL alignment: ≤ ± 2,0 µm
Exposure source
Mercury light source / UV LED light source
Wedge compensation
Fully automatic - SW controlled
Wafer diameter (substrate size)
Up to 100 / 150 / 200 mm
Exposure setup
Vacuum contact / hard contact / soft contact / proximity mode
Exposure options
Interval exposure / flood exposure / sector exposure
Advanced alignment features
Manual alignment / in-situ alignment verification
Manual cross correction
Large gap alignment
System control
Operation system: Windows
File sharing & back-up solution / unlimited no. recipes & parameters
Multi-language user GUI & support: CN, DE, FR, IT, JP, KR
Real-time remote access, diagnostics & troubleshooting
Nanoimprint lithography technology
UV-NIL

产品图片

接触式双面光刻机 1
图 1

向该会员发送查询

上海螣芯电子科技有限公司

上海市闵行区秀文路898号5号楼911室

电话︰
13122976482
传真︰
0-21-51567107
联系人︰
娄先生 (销售总监)
手机︰
13122976482

该公司相关产品信息

免责声明:以上信息由企业自行提供,内容的真实性和合法性由发布企业负责。「自助贸易」对此不承担任何保证责任。
举报投诉:如发现违法和不良资讯,请 点此处举报

中国供应商快速搜索︰

"其它电力、电子" 产品信息

"其它电力、电子" 供应商